Precision · Stability · Vacuum Compatibility

Short Description:

High-temperature vacuum coating bearings are widely used in semiconductor and coating equipment manufacturing. Engineered for thermal resistance, dry lubrication, and long-term performance in vacuum environments—enhancing equipment reliability and process stability.

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Purpose-Built High-Temperature Vacuum Coating Bearings for Coating Systems

In advanced vacuum deposition systems such as PVD (Physical Vapor Deposition), CVD (Chemical Vapor Deposition), and magnetron sputtering machines, bearings are exposed to extreme operational conditions—high vacuum, elevated temperatures, and continuous motion. To maintain coating precision and system uptime, it’s essential to choose specialized vacuum-compatible bearings.

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Why High-Temperature Vacuum Bearings Are Essential

Standard bearings are prone to failure in vacuum environments due to outgassing, lubricant evaporation, and thermal deformation. Our high-temperature vacuum bearings are engineered with specialized materials and dry lubrication technologies that provide reliable, low-friction operation without the need for oil or grease. This makes them ideal for vacuum environments where conventional lubricants are not suitable.

These bearings are particularly effective for:

• Vacuum-compatible deposition systems
• Bearings for PVD coating equipment
• Bearings for CVD systems
• Semiconductor processing lines requiring precision and durability

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Core Design Features of Vacuum-Compatible Bearings

Our vacuum bearings are constructed with high-performance materials to deliver maximum reliability in extreme environments:

• Martensitic stainless-steel inner and outer rings for superior strength, heat resistance, and corrosion protection
• Stainless steel balls for enhanced structural integrity and long service life
• Self-lubricating isolators (single or double type) to ensure smooth, particle-free rotation—essential for cleanroom compatibility

Additional design elements include:

• Austenitic stainless-steel shields to block dust and particulate contamination
• Phosphated retaining rings for strong, vacuum-sealed assembly
• Optional surface coatings (MoS₂, WS₂, or DLC) for enhanced wear resistance and support for oil-free operation

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Key Applications in Semiconductor and Vacuum Technology

Our precision bearings for semiconductor manufacturing are widely used in:

• Ion implantation systems
• Wafer transfer and thermal processing machines
• Vacuum evaporation and magnetron sputtering tools
• High-temperature sintering furnaces
• Optical, decorative, and functional film deposition equipment

In semiconductor cleanrooms, bearings must operate continuously in ultra-clean, oil-free, and high-vacuum conditions, where even minimal outgassing or thermal shift can impact yield. Our dry lubrication bearings for vacuum environments are designed to eliminate such risks and ensure high process stability.

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Custom High-Temperature Vacuum Coating Bearings for Deposition Systems

We offer custom vacuum bearings for deposition systems to meet a variety of complex engineering requirements. Our solutions cover:

• Dry lubrication for vacuum use
• High-temperature bearing performance
• Non-magnetic configurations
• Non-standard sizes and dimensions
• Advanced surface coatings for wear resistance and low friction

Whether your application involves frequent thermal cycling, ultra-high vacuum, or critical cleanliness standards, our engineering team can develop a tailored bearing solution to match your exact specifications.

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Bearings used in PVD and CVD systems must perform reliably under high vacuum and temperature. Learn more about vacuum coating methods here.

Contact Us

For technical consultation or to request a custom solution, please contact us at [email protected].
We're committed to supporting your most critical vacuum coating applications with durable, precision-engineered bearing solutions.